PDF Semiconductor Measurement Technology Download
- Author: United States. National Bureau of Standards
- Publisher:
- ISBN:
- Category : Semiconductors
- Languages : en
- Pages : 124
Handbook of Silicon Semiconductor Metrology
PDF Handbook of Silicon Semiconductor Metrology Download
- Author: Alain C. Diebold
- Publisher: CRC Press
- ISBN: 0203904540
- Category : Technology & Engineering
- Languages : en
- Pages : 703
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
